Configuration Options:
-
Duplex Pumps
-
Alternate OEM Pumps and
wetted materials to match chemical compatibility
-
Automatic air purging
-
Nitrogen blanket
pressure regulator and flow controls
-
Pump operation on
permissive/demand signal or pressure control
-
Constant flow with
backpressure control and return to the supply container
-
Valve Manifold Boxes (VMB)
for branch distribution within Fab area
-
Stainless steel
fabrication for solvents such as IPA
Control System Options:
-
Programmable Logic
Controller (PLC) or Relay Controls
-
Pump permissive dry
contacts for interlocks with upstream equipment
-
Integrated controls for
CDM and downstream VMB
-
Safety alarms for open
doors, leak containment, low and high pressure, proof of flow, and
others
-
Automatic supply
pressure control
-
Common trouble alarm dry
contacts for remote alarm notification
-
Ethernet LAN
communication for PLC controls
-
Building Management
System (BMS) integration
Pump Lift Stations
are used to transfer process tool waste water from gravity-fed drain
lines to treatment systems downstream. The lift stations may be located
close to process tools, or remote from the fabrication area in a
facility vault or yard area. The tank, pump and piping materials
selection will be matched to the expected process conditions.
Pump Options:
-
Air Operated Diaphragm (AOD)
-
Vertical or Horizontal
Centrifugal
-
Simplex or Duplex
Configurations
Tank Options:
-
Tank capacities from 16
gal to 2,000 gal
-
Single Tank or with
Secondary Containment Tank
-
Molded or fabricated
plastic tank construction (PP, PE, PVDF, PVC or CPVC)
-
Stainless Steel
Construction
-
With or without valve
manifold enclosures
Control System Options:
-
Level point switches or
continuous transmitters
-
Local or remote control
panel
-
Upstream and downstream
permissive signals
-
Flow and pressure
indicators and/or transmitters
-
Secondary containment
leak alarm
Process Cooling Water (PCW)
provides cooling to heat exchangers within process tools to
regulate operating temperatures. Process tools require purified water
(i.e. either reverse osmosis (RO) or de-ionized (DI) quality) as a
medium for cooling to avoid product or tool contamination in the event
of a heat exchanger leak. Wastech builds PCW skids that include the
pumps, filters, heat exchangers and controls to supply cooling water at
the flow rate and temperature required by the facility. The PCW fluid is
cooled by heat exchange with the facility’s chilled water system.
Configuration Options:
-
Flow rates from 50 gpm
to 2,400 gpm
-
Supply pressures from 20
psig to 110 psig
-
Multiple redundant
stainless steel pump arrangements
-
Variable Frequency Drive
(VFD) pump control
-
Stainless steel plate
and frame heat exchangers
-
20 micron filter unit
-
Sch 80 PVC or Stainless
steel piping
-
Nitrogen blanket
pressure regulator and flow controls for vented systems
-
Expansion tank for
closed systems
-
Powder-coated structural
steel skid
Control System Options:
-
Programmable Logic
Controller (PLC) or Relay Controls
-
Automatic supply
pressure and temperature control
-
Common trouble alarm dry
contacts for remote alarm notification
-
Ethernet LAN
communication for PLC controls
Process Hot Water
provide hot water in a closed loop to heat exchangers within wet bench
tools that require elevated temperatures for wafer processing solutions.
PHW skids include a gas-fired boiler, pumps, filters, expansion tank,
water treatment chemical feeder and controls to supply heating water at
the flow rate and temperature required by the facility
Configuration Options:
-
Flow rates from 200 gpm
to 300 gpm
-
Supply pressures from 20
psig to 100 psig
-
2 MMBTU to 5.4 MMBTU
heat output capacity
-
Output temperatures up
to 203°F (95°C)
-
Multiple redundant pump
arrangements
-
Variable Frequency Drive
(VFD) pump control
-
Powder-coated structural
steel skid
-
Welded carbon steel
piping
-
Expansion tank and
chemical addition feeder
Control System Options:
-
Programmable Logic
Controller (PLC) or Relay Controls
-
Automatic supply
pressure and temperature control
-
Common trouble alarm dry
contacts for remote alarm notification
-
Ethernet LAN
communication for PLC controls
DI Water Heating is a
heat exchanger package delivering hot DI water to wet bench tools that
require direct filling or dosing of process solutions with DI water at
an elevated temperature. The skid includes a titanium plate and frame
heat exchanger, flow control valves and temperature controller. This
system exchanges heat from a Process Hot Water (PHW) supply and a DI
Water source.
Configuration Options:
- Flow rates from 20 gpm to 40
gpm
- Output temperatures up to 185°F (85°C)
- Titanium plate and frame heat exchanger
- PVDF piping
- Welded polypropylene skid
Control System Options:
-
Programmable Logic
Controller (PLC) or Relay Controls
-
Automatic supply
pressure and temperature control
-
Common trouble alarm dry
contacts for remote alarm notification
Process Utility
Monitoring Systems monitor key parameters (e.g. pressure or flow
rate) for critical process utilities such as Compressed Dry Air (CDA),
Nitrogen (N2)
and process water. Measured values and alarms can be displayed locally
or remotely.
Air Dryer Automation
Systems (ADAS) are supervisory controllers that monitor the
Compressed Dry Air (CDA) supply to the facility and operates redundant
compressor / dryer units at maximum efficiency. Facilities have two or
more air compressor and dryer units to guarantee uninterrupted process
tool operation. ADAS distributes load to air dryers based on time and
alarms, thus reducing on-line time and
service costs, and yielding significant electrical power savings. ADAS
places redundant units on stand-by during periods of low CDA demand. It
will also rotate the lead and lag status of each unit on a user
definable schedule, so that operating hours can be evenly distributed
among all units. ADAS will notify facility personnel of alarm
conditions, and make emergency responses such as opening a back up
Nitrogen supply line in the event of complete compressor or dryer
failure.
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